PARAMETER |
TEST CONDITIONS |
MIN |
NOM |
MAX |
UNIT |
Micromirror tilt angle |
DMD landed state(1) |
|
17 |
|
degrees |
Micromirror tilt angle tolerance(2)(3)(4)(5) |
|
–1.4 |
|
1.4 |
degrees |
Micromirror tilt direction(6)(7) |
Landed OFF state |
|
180 |
|
degrees |
Landed ON state |
|
270 |
|
Micromirror crossover time(8) |
Typical Performance |
|
1 |
3 |
μs |
Micromirror switching time(9) |
Typical Performance |
10 |
|
|
Number of out-of-specification micromirrors(10) |
Adjacent micromirrors |
|
|
0 |
micromirrors |
Non-adjacent micromirrors |
|
|
10 |
(1) Measured relative to the plane formed by the overall micromirror array.
(2) Additional variation exists between the micromirror array and the package datums.
(3) Represents the landed tilt angle variation relative to the nominal landed tilt angle.
(4) Represents the variation that can occur between any two individual micromirrors, located on the same device or located on different devices.
(5) For some applications, it is critical to account for the micromirror tilt angle variation in the overall system optical design. With some system optical designs, the micromirror tilt angle variation within a device may result in perceivable non-uniformities in the light field reflected from the micromirror array. With some system optical designs, the micromirror tilt angle variation between devices may result in colorimetry variations, system efficiency variations or system contrast variations.
(6) When the micromirror array is landed (not parked), the tilt direction of each individual micromirror is dictated by the binary contents of the CMOS memory cell associated with each individual micromirror. A binary value of 1 results in a micromirror landing in the ON State direction. A binary value of 0 results in a micromirror landing in the OFF State direction.
(7) Micromirror tilt direction is measured as in a typical polar coordinate system: measuring counter-clockwise from a 0° reference which is aligned with the +X Cartesian axis.
(8) The time required for a micromirror to nominally transition from one landed state to the opposite landed state.
(9) The minimum time between successive transitions of a micromirror.
(10) An out-of-specification micromirror is defined as a micromirror that is unable to transition between the two landed states within the specified Micromirror Switching Time.