4 Revision History
Changes from Revision B (April 2022) to Revision C (May 2022)
- Updated Micromirror Array Optical
Characteristics
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Changes from Revision * (November 2018) to Revision A (July 2021)
- Updated the numbering format for tables, figures, and
cross-references throughout the document.Go
- ILLVIS changed to TBD in
Section 6.4
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- Updated |TDELTA| MAX from 30°C to 15°CGo
- Changed electrical characteristics values from TBD in
Section 6.6
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- Changed measured values for Capacitance under
Section 6.6
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- Included mechanical load values in
Section 6.9
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