PARAMETER | | MIN | NOM | MAX | UNIT |
---|
Micromirror tilt angle, variation device to device (1)(2)(3)(4) | | 11 | 12 | 13 | degrees |
Number of out-of-specification micromirrors (5) | Adjacent micromirrors | | | 0 | micromirrors |
Non-adjacent micromirrors | | | 10 |
(1) Measured relative to the plane formed by the overall micromirror array.
(2) Variation can occur between any two individual
micromirrors
located on the same device or located on different devices.
(3) Additional variation exists between the micromirror array and the package datums. See package drawing.
(5) An out-of-specification micromirror is defined as a micromirror that is unable to transition between the two landed states.