| SYMBOL | PARAMETER | TEST CONDITIONS | MIN | TYP | MAX | UNIT |
|---|
| Micromirror tilt angle(2)(3)(4)(5) | landed state(1) | 11 | | 13 | Degrees |
| COT | Micromirror crossover time(6) | typical performance | | 1 | 3 | μs |
| Micromirror switching time(7) | typical performance | 4 | | | μs |
|
Orientation of the micromirror axis-of-rotation(8) |
|
44 |
|
46 |
Degrees |
|
Micromirror array optical efficiency(9)(10) |
400nm to 420nm, with all micromirrors in the ON state |
|
66% |
|
|
|
Micromirror array optical efficiency(9)(10) |
410nm to 800nm, with all micromirrors in the ON state |
|
63% |
|
|
|
Non-operating micromirrors(11) |
Non-adjacent micromirrors |
|
|
10 |
micromirrors |
| Adjacent micromirrors |
|
|
0 |
(1) Measured relative to the plane formed by the overall micromirror array.
(2) Additional variation exists between the micromirror array and the package datums.
(3) Represents the landed tilt angle variation relative to the nominal landed tilt angle.
(4) Represents the variation that can occur between any two individual micromirrors, located on the same device or located on different devices.
(5) For some applications, it is critical to account for the micromirror tilt angle variation in the overall system optical design. With some system optical designs, the micromirror tilt angle variation within a device may result in perceivable non-uniformities in the light field reflected from the micromirror array. With some system optical designs, the micromirror tilt angle variation between devices may result in colorimetry variations, system efficiency variations or system contrast variations.
(6) The time required for a micromirror to nominally transition from one landed state to the opposite landed state.
(7) The minimum time between successive transitions of a micromirror at the end of
a Mirror Clocking Pulse to the beginning of the next Mirror Clocking Pulse.
(8) Measured relative to the package datums 'B' and 'C'.
(9) The minimum or maximum DMD optical efficiency observed in a specific application
depends on numerous application-specific design variables, such as:
- Illumination wavelength, bandwidth/line-width, degree of coherence
- Illumination Angle, plus angle tolerance
- Illumination and projection aperture size, and location in the system
optical path
- Illumination overfill of the DMD micromirror array
- Aberrations present in the illumination source and/or illumination
path
- Aberrations present in the projection path
The specified nominal DMD optical efficiency is based on the following
use conditions:
- Visible illumination (400 to 800 nm)
- Input illumination optical axis oriented at 24° relative to the window
normal
- Projection optical axis oriented at 0° relative to the window normal
- ƒ / 3 illumination aperture
- ƒ / 2.4 projection aperture
Based on these use conditions, the nominal DMD optical efficiency
results from the following four components:
- Micromirror array fill
factor: nominally 90%
- Micromirror array
diffraction efficiency: nominally 86%
- Micromirror surface
reflectivity: nominally 88%
- Window transmission:
nominally 97% (single pass, through two surface transitions)
(10) Does not account for the effect of micromirror switching duty cycle, which is
application dependent. Micromirror switching duty cycle represents the
percentage of time that the micromirror is actually reflecting light from the
optical illumination path to the optical projection path. This duty cycle
depends on the illumination aperture size, the projection aperture size, and the
micromirror array update rate.
(11) Non-operating micromirror is defined as a micromirror that is unable to
transition nominally from the "OFF" position to the "ON" position or vice
versa.